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Maskless Aligner - List of Manufacturers, Suppliers, Companies and Products

Maskless Aligner Product List

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Maskless Aligner "MLA150"

High-speed maskless aligner capable of fine drawing at 0.6μm.

The Maskless Aligner MLA150 is a non-contact laser exposure device that does not require a mask. With its exceptional ease of use and high speed, it is an ideal laser direct writing system for rapid prototyping, small to medium production, and research and development environments. Since the Maskless Aligner series was first introduced in 2015, innovative and cutting-edge maskless technology has been established. The MLA150 is positioned as an alternative to traditional mask aligners, with over 130 units shipped.

  • Photomask
  • Stepper

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Maskless aligner "uMLA" (Micro M L A)

Tabletop-sized autofocus maskless aligner

The tabletop system's maskless aligner µMLA features cutting-edge maskless technology and is an entry-level drawing device suitable for all research and development areas requiring fine structures. Typical applications include microfluidics, microoptics, sensors, MEMS, and materials science. The µMLA (Micro M L A) is a state-of-the-art maskless exposure device that is more economical and offers superior customizable flexibility compared to previous tabletop direct writing devices.

  • Photomask
  • Stepper

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Maskless Aligner "MLA300"

High-performance maskless aligner for production

The MLA300 is an industrial production version of a maskless aligner that has already become the standard in the fields of research and development applications, rapid prototyping, and low to medium volume production. The MLA300 achieves high resolution with a line and space of 2 µm while maintaining the high throughput and availability expected in production facilities. It is equipped with a wafer robot and load port, as well as software specially designed for production environments, to accommodate automation for streamlining workflows.

  • Stepper
  • Photomask
  • Other semiconductor manufacturing equipment

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